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Schematic of various optical systems that are capable of tackling the diverse challenges in patterned defect inspection (IMAGE)
Diverse optical wafer defect inspection systems including (a) Brightfield/darkfield imaging system, (b) Dark-field imaging with null ellipsometry, (c) Through-focus scanning imaging microscopy ...
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Schematic of STXM (IMAGE)
Fig. 1. Schematic of an optical system of a scanning transmission soft X-ray microscope (STXM). Disclaimer: AAAS and EurekAlert! are not responsible for the accuracy of news releases posted to ...
Compact optical device achieves super-resolution imaging beyond the diffraction limit
Researchers from the University of Science and Technology of China (USTC) have unveiled a planar optical device that significantly enhances the capabilities of dark-field microscopy, achieving ...