EurekAlert!2y
Schematic of various optical systems that are capable of tackling the diverse challenges in patterned defect inspection (IMAGE)
Diverse optical wafer defect inspection systems including (a) Brightfield/darkfield imaging system, (b) Dark-field imaging with null ellipsometry, (c) Through-focus scanning imaging microscopy ...
EurekAlert!3y
Schematic of STXM (IMAGE)
Fig. 1. Schematic of an optical system of a scanning transmission soft X-ray microscope (STXM). Disclaimer: AAAS and EurekAlert! are not responsible for the accuracy of news releases posted to ...